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Sputtering Targets

The sputtering targets we are manufacturing show unparalleled outstanding performance by virtue of high density, excellent purity, and distinguished homogeneous microstructure. The popular geometries featuring with both planar and rotatable shapes, such as circular, rectangular, ring, tube, cylinder and conicity, are all available. If you have your own unique requirements about the sputtering targets, no matter in density, purity, homogeneity or in geometry, please let us know exactly what you need. We’ll do our utmost to meet your requirements precisely.

Our strength lies in supplying not only sputtering targets, but also backing plates and bonding service.
Sputtering Targets
 
Metals/Alloys
Product Code Product Name Chemical Formula Purity(%) Density
CAS#
F-ST-1018 Tungsten W 99.99 19.3   7440-33-7
F-ST-1020 Molybdenum Mo 99.99 10.22   7439-98-7
F-ST-1021 Tantalum Ta 99.5 16.6   7440-25-7
F-ST-1023 Niobium Nb 99.95 8.55   7440-03-1
F-ST-1042 Zirconium Zr 99.9 6.4   7440-67-7
F-ST-1012 Titanium Ti 99.9 4.5   7440-32-6
F-ST-1013 Niobium Ni 99.99 8.9   7440-02-0
F-ST-1016 Chromium Cr 99.5-99.99 7.2   7440-47-3
F-ST-1027 Germanium Ge 99.999 5.35   7440-56-4
F-ST-1028 Aluminum Al 99.99-99.999 2.7   7429-90-5
F-ST-1033 Zinc Zn 99.9 7.14   7440-66-6
F-ST-1034 Silicon Si 99.999 2.42   7740-21-3
F-ST-1036 Silver Ag 99.995 10.49   7440-22-4
F-ST-1038 Copper Cu 99.99 8.92   7440-50-8
F-ST-1041 Stainless Steel / 99.99 7.8   7439-89-6
F-ST-1050 Niobium Chromium Ni/Cr 99.5-99.9 /   12661-84-6
F-ST-1051 Niobium vanadium Ni/V 99.5-99.9 /   /
F-ST-1052 Niobium Iron Ni/Fe 99.9-99.99 /   61106-39-6
F-ST-1055 Titanium Aluminum Ti/Al 99.9-99.99 /   /
F-ST-1058 Aluminum Titanium Al/Ti 99.9-99.99 /   /
F-ST-1063 Zinc aluminum Zn/Al 99.5-99.9 /   /
F-ST-1077 Titanium Tungstun Ti/W 99.5-99.9 /   /
 
Oxides
Product Code Product Name Chemical Formula Purity(%) Density
CAS#
F-ST-2023 Silicon Oxide SiO2 99.99、99.999 2.2-2.7   7631-86-9
F-ST-2002 Indium Tin Oxide ITO 99.99 7.12   50926-11-9
F-ST-2003 Aluminum Zinc Oxide AZO 99.99 5.35   /
F-ST-2006 Magnesium oxide MgO 99.95 3.58   1309-48-4
F-ST-2009 Zinc Oxide ZnO 99.99 5.61   1314-13-2
F-ST-2011 Chromium Oxide Cr2O3 99.9-99.99 5.21   1308-38-9
F-ST-2012 Cerium Oxide Cerium Oxide 99.9-99.99 7.3   1306-38-3
F-ST-2015 Yttrium Oxide Y2O3 99.99 4.84   1314-36-9
F-ST-2017 Neodymium Oxide Nd2O3 99.5-99.9 /   1313-97-9
F-ST-2020 Hafnium Oxide HfO2 99.99 9.68   12055-23-1
F-ST-2022 Silicon Monoxide SiO 99.99 2.1   10097-28-6
F-ST-2027 Zirconium Oxide ZrO2 99.9-99.99 5.49   1314-23-4
F-ST-2029 Aluminum Oxide Al2O3 99.99 3.98   1344-28-1
F-ST-2030 Titanium Oxide TiO2 99.9-99.99 4.29   13463-67-7
F-ST-2031 Titanium Oxide TiOx 99.99 4.29   /
F-ST-2033 Scandium Oxide Sc2O3 99.5-99.9 /   12060-08-1
F-ST-2035 Vanadium Oxide V2O5 99.5-99.9 /   1314-62-1
F-ST-2036 Gallium Oxide Ga2O3 99.5-99.9 /   12024-21-4
F-ST-2039 Tungsten Oxide WO3 99.99 12.1   1314-35-8
F-ST-2040 Niobium Oxide Nb2O5 99.99 7.5   1313-96-8
F-ST-2043 Tantalum Oxide Ta2O5 99.99 8.74   1314-61-0
F-ST-2047 Indium Oxide In2O3 99.99 7.18   1312-43-2
 
Others
Product Code Product Name Chemical Formula Purity(%) Density
CAS#
F-ST-3011 Zinc Sulfide ZnS 99.99 4.09   1314-98-3
F-ST-3012 Zinc Selenide ZnSe 99.999 5.42   1315-09-9
F-ST-3016 Titanium Carbide TiC 99.99 4.8   12070-08-5
F-ST-3018 Silicon Carbide SiC 99.9 /   409-21-2
F-ST-3021 Boron Carbide B4C 99.5-99.9 /   12069-32-8
F-ST-3022 Tungstun Carbide WC 99.9-99.99 /   12070-12-1
F-ST-3024 Boron Nitride BN 99.5-99.9 /   10043-11-5
F-ST-3027 Aluminium Nitride AlN 99.5-99.9 /   24304-00-5
F-ST-3039 Silicon Nitride Si3N4 99.9-99.99 12033-89-5   /
F-ST-3040 Titanium Boride TiB2 99.5-99.9 /   12045-63-5
F-ST-3058 Lanthanum Boride LaB6 99.9-99.99 /   12008-21-8
 
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